Chemical Vapor Deposition of Longitudinal Homogeneous Parylene Thin-Films inside Narrow Tubes

The effect of quasi-exponentially decreasing film thicknesses thin poly-para-xylylene (PPX-N) coatings inside narrow tubes or micro scaled gaps is well known and has been discussed by many authors since the late 1970s. However, for technical applications it often necessary to provide a longitudinal homogeneous thickness ensure constant properties that are required. In previous work, was shown, in principle first time, temperature gradient along tube will effectively counteract PPX-N coating interior wall capillary. Therefore, this theory provided model verified experiments. Our prediction required sticking coefficient curve yields experimentally measured shows good agreement with given prognosis. Further, shown there maximum achievable comparison blank surface, which can be understood as efficiency type deposition.